The home for science and engineering™
English
中文
Русский
日本語
Português
Deutsch
Français
Español
Prices and Subscription Policies
About Begell House
Contact Us
Customer Login
0
Shopping Cart
Search box
Search
Home
Books
eBooks
Journals
References and Proceedings
Authors, Editors, Reviewers
A-Z Product Index
Find Journals
Home
Begell House Authors, Editors and Reviewers
Begell House Authors, Editors and Reviewers
Menu
For Authors
For Editors
For Reviewers
Vitaly A. Solodukha
JSC "INTEGRAL" − Holding Management Company, 121A Kazinets Str., Minsk, 220108, Belarus
Get more info about author from Directory of Specialists
Articles
CHARACTERISTIC FEATURES OF HEATING SEMICONDUCTOR SILICON STRUCTURES DURING RAPID THERMAL TREATMENT IN THE VLSI TECHNOLOGY
Vol. 22 '2018
-
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
FORMATION OF PLATINUM SILICIDE DURING RAPID THERMAL PROCESSING OF THE PLATINUM− SILICON SYSTEM: MICROSTRUCTURE AND ELECTROPHYSICAL CHARACTERISTICS
Vol. 23 '2019
-
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
FORMATION OF PLATINUM SILICIDE LAYERS DURING THE RAPID THERMAL PROCESSING OF THE PLATINUM–SILICON SYSTEM: STRUCTURAL-PHASE CHANGES
Vol. 23 '2019
-
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
INFLUENCE OF RAPID THERMAL TREATMENT OF INITIAL SILICON WAFERS ON THE ELECTROPHYSICAL PROPERTIES OF SILICON DIOXIDE OBTAINED BY PYROGENOUS OXIDATION
Vol. 23 '2019
-
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
OPTICAL AND ELECTROPHYSICAL PROPERTIES OF GATE DIELECTRICS OBTAINED BY MEANS OF RAPID THERMAL PROCESSING
Vol. 26 '2022
-
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
Home
Begell Digital Portal
Begell Digital Library
Journals
Books
eBooks
References and Proceedings
Authors, Editors, Reviewers
A-Z Product Index
Find Journals
Prices and Subscription Policies
About Begell House
Contact Us
Language
English
中文
Русский
日本語
Português
Deutsch
Français
Español