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M. SorokinDepartment of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
Articles:FLOW AND TEMPERATURE DEPENDENCE OF PARTICLE FORMATION IN AR-SILANE RF CAPACITIVELY COUPLED PLASMAS - Vol. 9 '2005 - High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
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