Begell House Authors, Editors and Reviewers

J. Remy

Technische Universiteit Eindhoven, Applied Physics dept, Den Dolech 2, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, EU
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Articles

IN SITU IR OPTICAL MEASUREMENTS OF GAS PROPERTIES IN A CAPACITIVELY COUPLED RF Ar/SiH4 PLASMA Vol. 9 '2005 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes