Begell House Authors, Editors and Reviewers

Marek Elias

Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, CZ-611 37 Brno, Czech Republic

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Articles

REDUCTION OF TUNGSTEN PRECURSORS IN INDUCTIVE RF DISCHARGE PLASMA REACTORS Vol. 7 '2003 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

REDUCTION OF TUNGSTEN PRECURSORS IN INDUCTIVELY COUPLED RF DISCHARGE Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003