Begell House Authors, Editors and Reviewers

A.A. Goryachev

Institute of Microelectronics of Russian Academy of Sciences, Universitetskaya 21, 150000 Yaroslavl, Russia

Get more info about author from Directory of Specialists

Articles

PLASMA STIMULATED GROWTH OF THIN FILMS Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999

STUDY OF LOW TEMPERATURE PLASMA-STIMULATED GROWTH OF YSZ THIN FILMS ON Si SUBSTRATE Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999