Begell House作者，编辑及审稿者

P. Kopycinski

Maria Curie-Sklodowska University, Lublin, Poland
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Articles

LIGHT-EMITTING N-RICH SILICON NITRIDE FILMS DEPOSITED BY PLASMA-ENHANCED AND LOW-PRESSURE CVD Vol. 18 '2014 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes