Begell House作者，编辑及审稿者

Z. B. Omarova

Institute of Physics and Technology, 050032 Ibragimov str, 11, Almaty, Kazakhstan
Get more info about author from Directory of Specialists

Articles

AN INFLUENCE OF PLASMA TREATMENT ON STRUCTURE PROPERTIES OF THIN SiC FILMS ON Si Vol. 14 '2010 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes