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Progress in Plasma Processing of Materials, 2001

ISBN:
1-56700-165-3 (Print)

CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON−EQUILIBRIUM MODEL OF AR PLASMA

Sergey V. Dresvin
Laboratory of Electrotechnological and Plasma Installation of Polytechnic Institute -SPb State Polytechnical University, 29 Polytechnicheskaya Str., 195251 Saint-Petersburg, Russia

Shi Nguen-Kuok
Laboratory of Electrotechnological and Plasma Installation Polytechnical Institute - University of St-Petersburg, Russia

D. Ivanov
St. Petersburg State Polytechnic University, 29 Politekhnicheskaya Str., St. Petersburg, 195251, Russia

Jacques Amouroux
Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Abstract

Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz, power 2 − 4 kW, inner diameter of the torch 24 mm plasma gas - argon. Plasma torch has three axial gas flows: sheath gas Gl=20 l/min, plasma gas G2=2.4 i/min, transport gas G3=3.4 l/min. Calculation has been performed within the frame of the method of control volume. The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.