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Progress in Plasma Processing of Materials, 2001

ISBN:
1-56700-165-3 (Print)

INVESTIGATION OF SPATIAL CHARGE SHELL OF SPECIMEN IN INDUCTIVE COUPLED RF DISCHARGE AT LOW PRESSURE

I. A. Abdullin
Kazan State Technological University, Kazan, Russian Federation

M. Shaekhov
Kazan State Technological University, Light Industry Department

Abstract

The nlagnitude of the positive charge shell and energy of ions in a vicinity of a processed product and ionic current density onto a surface in an inductive coupled RF discharge at lowered pressure is measured. A single electrostatic probe, an analyzer of energy of ions based on a coaxial-cylinder capacitor and two-beanl laser interferOlneter were used for Ineasuring paralneters of a positive charge shell.
It is defined that thickness of positive charge shell is fronl 0,3 up to 0,5 DIm. Energy of ions acting on a sanlple surface Wi and ionic current density onto the surface ji was in the following ranges: Wi = 10−50 eV, ji = 1.5−25 A/m2. It is established, that when a dielectric specimen is treated, the nlagnitude of ions energy is larger than 0 when a conductor specilnen is treated.
Investigations of RFI plaslna under lo\vered pressure show that RF discharge burns between the product the upper coil ofthe inductor.