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Progress in Plasma Processing of Materials, 1997

ISBN:
1-56700-093-2 (Print)

Si-C-N COMPOSITE POWDERS, THERMAL PLASMA SYNTHESIS AND CHARACTERIZATION

R. Mach
TU Berlin, Institut fur Nichtmetallische Werkstoffe/Plasmachemie Rudower Chaussee 5, D-12489 Berlin

H.-D. Klotz
TU Berlin, Institut fur Nichtmetallische Werkstoffe/Plasmachemie Rudower Chaussee 5, D-12489 Berlin

C. Dreher
TU Berlin, Institut fur Nichtmetallische Werkstoffe/Plasmachemie Rudower Chaussee 5, D-12489 Berlin

C. Olschewski
TU Berlin, Institut fur Nichtmetallische Werkstoffe/Plasmachemie Rudower Chaussee 5, D-12489 Berlin

H. Drost
TU Berlin, Institut fur Nichtmetallische Werkstoffe/Plasmachemie Rudower Chaussee 5, D-12489 Berlin

Abstract

Nanoscale Si-C-N composite powders with mean particle size less than 100 nm were synthesized by the RF induction plasma. Reactions of methylated silanes (Si(CH3)4 or SiCl3CH3) and NH3 or between nonmethylated silanes (SiCl4 or SiH4), C2H4, and NH3 were studied. Both the chemical composition and the morphology of nanoscale Si-C-N composites can be controlled by precursors as well as processing. Crystalline phase is mainly β-SiC, but sometimes a change of the lattice constant suggests a nitrogen incorporation into the SiC lattice. Annealing of the composite powders results in nanostructured powders, containing β-SiC as well as α-Si3N4 and β-Si3N4. Additionally temperature fields of the RF induction plasma were determined theoretically as well as experimentally.