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Progress in Plasma Processing of Materials, 1997

ISBN:
1-56700-093-2 (Print)

ACCOMMODATION AND RECOMBINATION COEFFICIENTS MEASUREMENTS OF ATOMIC OXYGEN ON METALLIC SURFACES

P. Cauquot
Laboratoire de Genie des Procedes Plasmas et Traitement de Surface - ENSCP -11, rue Pierre et Marie Curie - 75231 Paris Cedex 05

F. Nguyen-Xuan
Laboratoire de Génie des Precédés Plasma-ENSCP- 11, rue P. et M. Curie 75231 Paris Cedex 05, France

E. Neillo
Laboratoire de Génie des Precédés Plasma-ENSCP- 11, rue P. et M. Curie 75231 Paris Cedex 05, France

S. Cavadias
Laboratoire Genie Precedes Plasmas - ENSCP 11, rue Pierre et Marie Curie - 75005 Paris- France

Jacques Amouroux
Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Abstract

In order to quantify the energy transfer from the reactive flow to a surface, determination of recombination and accommodation coefficients (respectively Gamma and Bêta coefficients) is required. The following work concerns atomic oxygen flow recombining on metallic surfaces. The experimental set-up is a microwave plasma created in a flow tubular reactor, in which sample tubes used as calorimeters, are placed perpendicularly to the flow. This method allows even high temperature measurements, without taking into account the perturbations due to radiation losses. At the same time, calculations of recombination coefficients γ have been performed according to the mass transfer dimensionless numbers correlations. As a result of this work, the establishment of an absolute catalycity scale for the studied materials has been obtained.