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Proceedings of Symposium on Energy Engineering in the 21<sup>st</sup> Century (SEE2000) Volume I-IV

ISSN:
1-56700-132-7 (Print)

UNSTEADY HEAT AND MASS TRANSFER FOR MULTI-COMPONENT PARTICLE DEPOSITION IN THE MODIFIED CHEMICAL VAPOR DEPOSITION

K. S. Park
LG Cable Inc.

Mansoo Choi
National CRI Center for Nano Particle Control, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151 -742, Korea

Jae Dong Chung
National CRI Center for Nano Particle Control, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151 -742, Korea

Abstract

A numerical analysis of unsteady heat and mass transfer for multi-component particle deposition in the Modified Chemical Vapor Deposition has been carried out. The earlier study showed that the optimized torch speed variation could be used to enhance the deposition uniformity of single component SiO2 particle. However, this optimized torch speed resulted in the deterioration of GeO2 deposition uniformity for multi-component SiO2/GeO2 deposition. Parametric studies varying three different operating conditions in time, maximum wall temperature, torch speed and in-take amount of GeCl4 reveals that the uniformity of SiO2 deposition is maintained by torch speed variation and that of GeO2 is obtained by increasing the in-take flow rate of GeCl4 in time.