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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (Print)

RATE CONSTANTS OF UNIMOLECULAR REACTIONS OF SF6 AND PRODUCTS OF ITS DISSOCIATION AT THE LOW PRESSURE LIMIT

Milada Bartlova
Brno University of Technology, Technicka 8, 616 00 Brno

L. Adamec
TU Brno, Faculty of E1. Engineering & Computer Science Dept. of Spec. E1. Engin. and Quality, Bozetechova 2, 612 66 Brno, Czech Republic

O. Coufal
Technical University of Brno, Bozetechova 2, 612 66 Brno, Czech Republic

Abstract

This paper describes the calculation of unimolecular dissociation of SF6, SF5, SF4, SF3, SF2 in temperature range T ∈ (500,6000) K at the low pressure limit. The theory is based on the solution of the master equation. The strong collision assumption is used. The basic simplified expression for harmonic oscillator model is improved by factors of anharmonicity, energy dependence of the density of states and external and internal rotations.