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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (Print)

SIMULATION OF THE d3Πg-a3Πu SYSTEM (SWAN BAND) OF THE C2 MOLECULE IN ATMOSPHERIC PRESSURE ARGON ICP FOR DIAGNOSTIC OF DIAMOND DEPOSITION PROCESS

A. Tazeem
Laboratoire de physico-chimie industrielle, 8.401, INSA F-69621, Villeurbanne, France

C. Trassy
UPR 9033 CNRS - EPM, ENSHMG BP 95 - 38402 Saint-Martin-d'Heres - France

Abstract

A spectroscopic method using the molecular spectrum of C2 to determine temperature in diamond chemical vapour deposition processes running at atmospheric pressure has been studied. Under atmospheric pressure conditions, the argon interferences cannot be ignored without inducing important errors. The precise simulation of emission spectra permits a rigorous line selection and background correction. Systematic comparison has been done with the values of temperature obtained using iron spectrum. The resulting method is fast and easy to implement. The temperatures measured from iron and C2 spectra are close, suggesting that important difference between excitation and rotational temperatures sometimes quoted in literature could be due, at least partly, to spectroscopic mistakes.