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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (Print)

PLASMA CHEMICAL SYNTHESIS OF FINE MoSi2 AND MoSi2-Si3N4 COMPOSITE POWDERS

A. Orlov
Institute of Inorganic Chemistry, Miera str. 34, Salaspils-1, LV 2169, Latvia

J. Grabis
Institute of Inorganic Chemistry, Miera str. 34, Salaspils-1, LV 2169, Latvia

Abstract

The preparation of fine MoSi2 and MoSi2 - Si3N4 composite powders with specific surface area of 16-33 and 30-41 m2/g respectively by evaporation of Si and Mo raw powder mixtures or coarse grained MoSi2 in radio frequency inductively coupled nitrogen plasma flow was investigated. Specific surface area of obtained powders as well as content of MoSi2 modifications, Si3N4 and extra phases Mo5Si3, Si depend on the raw powder feeding rate, the cooling gas flow rate and the composition of raw mixtures. The shape of the product particles was spherical for MoSi2 and both spherical and whiskers for composites.