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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (Print)

CONSISTENT CALCULATION OF ELECTRON-IMPACT ELECTRONIC AND VIBRONIC RATE COEFFICIENTS IN NITROGEN PLASMAS

Laurent C. Pierrot
Mechanical Engineering Department, Thermosciences Division Building 520, Stanford University, CA 94305-3032, USA

Christophe O. Laux
Mechanical Engineering Department, Thermosciences Division Building 520, Stanford University, CA 94305-3032, USA

Charles H. Kruger
Mechanical Engineering Department, Thermosciences Division Building 520, Stanford University, CA 94305-3032, USA

Abstract

We present a new method for the calculation of electron-impact electronic and vibronic rate coefficients in nitrogen plasmas in which rotational levels are taken into account, and we analyze differences with existing methods. High-lying rotational levels, neglected in previous methods, are shown to have a major influence on dissociation rates. Calculated vibronic depletion rates of the B state of N2 under the experimental conditions of Ref. [1] are significantly smaller than predissociation rates.