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Progress in Plasma Processing of Materials, 1999

1-56700-126-2 (Print)


N. A. Gorbunov
Physics Institute of St.-Petersburg State University, Ulianovskaya 1, 198904 St.-Petersburg, Russia *ENISE, 58 rue Jean Parot, 42023 St.-Etienne, France

P. Latyshev
Physics Institute, St.-Petersburg University, Ulianovskaya 1 198904, St. Petersburg, Russia

I. Yu. Smurov
C. N. R. S., Institut de Science et de Genie des Materiaux et Procedes B. P. 5, Odeillo, F-66125 Font-Romeu Cedex; Ecole Nationale d'Ingenieurs de Saint-Etienne, 58 rue Jean Parot, 42023 Saint -Etienne Cedex 2, France


This work is focused on the analysis of the oscillation character of electron temperature, electron density and concentration of excited atoms under plasma relaxation conditions. A theoretical model of this phenomenon is presented, which is based on self-consistent balance equations as a dynamic system.
It is shown that in case of a low ionisation degree the oscillations may arise when the relaxation frequencies of free electron energy losses, which are determined elastic electron-atom collisions, the radiative population of resonant levels and their quenching due to inelastic collisions are almost equal to each other. In case of rather high ionisation degree the self-oscillations can arise when the energy losses of free electrons are determined by electron-ion collisions.