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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (Print)

CALCULATION OF A TWO-TEMPERATURE PLASMA COMPOSITION IN MOLECULAR GASES; EXAMPLE OF SF6

Alain Gleizes
Centre de Physique des Plasmas et de leurs Applications de Toulouse (CPAT) UMR n° 5002 − Université Paul Sabatier, 118 Route de Narbonne F31062 Toulouse Cedex 4 - France

B. Chervy
Centre de Physique des Plasmas et de leurs Applications de Toulouse, ESA 5002 Université Paul Sabatier, 118 route de Narbonne, F31062 Toulouse cedex 4, France

J. J. Gonzalez
Laboratoire Plasma et Conversion d'Energie, UMR UPS-INP-CNRS5213, Université Paul Sabatier, 118 Route de Narbonne, 31062 Toulouse cedex 9, France

P. Krenek
Institute of Plasma Physics AS CR, Za Slovankou 3, 182 00 Praha 8

Abstract

We have used two sets of laws for computing the two-temperature composition of an SF6 plasma for several pressure values. The results show that the number densities of dominant species depend weakly on the choice of 2T laws whereas the number density of diatomic molecules or ions is influenced by this choice. Finally, when the excitation temperature depends on the electron density - which seems the most realistic condition - the evolution of several species concentrations versus Te present very steep variations (around Te < 8000 K).