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Progress in Plasma Processing of Materials, 2003

ISBN:
978-1-56700-192-1 (Print)
978-1-56700-447-2 (Online)

DEPOSITION OF COATINGS BY A JET RF-PLASMA OF LOW PRESSURE

R. T. Galiaoutdinov
Scientific and Research Institute of Pumping Engineering Technology apart. 20, house 42, Gavrilova str., Kazan 420137, Russia

N. F. Kashapov
Kazan Federal University, 7-148 Ajdarova Str., Kazan, 420037, Russian Federation

Abstract

Were investigated basic electrophysical and mechanical characteristics of a dielectric and metal films.