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Progress in Plasma Processing of Materials, 2003

ISBN:
978-1-56700-192-1 (Print)
978-1-56700-447-2 (Online)

THEORETICAL AND EXPERIMENTAL INVESTIGATIONS OF MODIFICATION OF MATERIALS AT LOW PRESSURE RF PLASMAS

I. A. Abdullin
Kazan State Technological University, Kazan, Russian Federation

Victor Jeltoukhine
Dpt. of Calculating Mathematics and Cybernetics -Kazan State University 18, Kremlyovskaya str., Kazan 420008 - Russia

A. Meckeshkin-Abdullin
Dpt. of Light Industries - Kazan State Technological University 68, K.Marks str., Kazan 420015 - Russia

Abstract

Authors present a physical and mathematical model of low-pressure RF plasma processing of solid surfaces. It is showed that the ion energy Ei. and the ion current density ji. onto the solid surface, which are the major generalized parameters of RF plasma treatment of solids, are achieved to values Ei = 10 ÷ 100 eV, ji = 0.3 ÷ 25 A·m−2.