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Progress in Plasma Processing of Materials, 2003

ISBN:
978-1-56700-192-1 (Print)
978-1-56700-447-2 (Online)

CALCULATION OF PLASMA PARAMETERS IN A RF ICP TORCH BY NON-EQUILIBRIUM MODEL OF AR PLASMA

Sergey V. Dresvin
Laboratory of Electrotechnological and Plasma Installation of Polytechnic Institute -SPb State Polytechnical University, 29 Polytechnicheskaya Str., 195251 Saint-Petersburg, Russia

Jacques Amouroux
Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Nguen Quoc Shi
State Technical University, St Petersburg Russia

D. Ivanov
St. Petersburg State Polytechnic University, 29 Politekhnicheskaya Str., St. Petersburg, 195251, Russia

Abstract

A calculation of plasma parameters in RF ICP torch was made using a non-equilibrium model. The RF ICP torch for spectrochemical analysis works at a frequency of 28 MHz; the plasma power is 1 kW; the inner diameter of the torch is 24 mm and the plasma gas is argon. The plasma torch has three axial gas flows: the transport gas flow is G1=3.4 l/min, the plasma gas flow is G2=2.4 l/min, the sheath gas flow is G3=20 l/min.
Two cases were calculated: without and with the transport gas flow. The results calculated using the Saha and Potapov equations were compared. The results of calculation from an equilibrium (LTE) model are also given for comparison.