Autores, Editores y Críticos de Begell House

V.F. Bochkarev

Institute of Microelectronics of Russian Academy of Sciences Universitetskaya 21 - 150000 Yaroslavl -Russia
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Articles

STUDY OF LOW TEMPERATURE PLASMA-STIMULATED GROWTH OF YSZ THIN FILMS ON Si SUBSTRATE Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999