Autores, Editores y Críticos de Begell House

A.A. Goryachev

Institute of Microelectronics of Russian Academy of Sciences, Universitetskaya 21, 150000 Yaroslavl, Russia

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Articles

PLASMA STIMULATED GROWTH OF THIN FILMS Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999

STUDY OF LOW TEMPERATURE PLASMA-STIMULATED GROWTH OF YSZ THIN FILMS ON Si SUBSTRATE Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999