Auteurs, éditeurs et examinateurs de Begell House

M. A. Zatevakhin

Institute of High-Performance Computations and Databases of the St. Petersburg State Polytechnic University, Russian Federation
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Articles

Numerical Modeling of Heat and Mass Transfer Processes in PECVD Reactors for Growing Silicon Films under the Conditions of Intense Formation of Higher Silanes in the Gas Phase Vol. 38 '2007 - Heat Transfer Research