Auteurs, éditeurs et examinateurs de Begell House

Y. H. Lee

Dept. of Materials Engineering, Sungkyunkwan University, 300 Chunchun-dong, Suwon, Kyunggi-do, 440-746 Korea
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Articles

THE STUDY OF ATMOSPHERIC PRESSURE PLASMA BY CAPILLARY DIELECTRIC COVERED ELECTRODE AND ITS APPLICATION TO PHOTORESIST ETCHING AND SURFACE CLEANING Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003