High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) An International Journal

ISSN for PRINT: 1093-3611

For Online Access

Best Paper Award Selection - Editorial Board Site

2001, Volume5

Issue 1

140 pages

Issue price - $144.00

Sergey Dresvin
Laboratory of Electrotechnological and Plasma Installation of Polytechnic Institute -SPb State Polytechnical University, 29 Polytechnicheskaya Str., 195251 Saint-Petersburg, Russia

Nguyen Kuok - Shi
Technical University, Polytechnic Str 29, 195251 Saint Petersburg, Russia

D. Ivanov
St. Petersburg State Polytechnic University, 29 Politekhnicheskaya Str., St. Petersburg, 195251, Russia

Jacques Amouroux
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz, power 2 − 4 kW, inner diameter of the torch 24 mm, plasma gas − argon. Plasma torch has three axial gas flows: sheath gas G₁=20 l/min, plasma gas G₂=2.4 l/min, transport gas G₃=3.4 l/min. Calculation has been performed within the frame of the method of control volume.
The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.

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