High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) An International Journal

ISSN for PRINT: 1093-3611

For Online Access

Best Paper Award Selection - Editorial Board Site

2001, Volume5

Issue 1

140 pages

Issue price - $144.00

Andre Plain
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France

lsabelle Geraud-Grenier
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France

Veronique Massereau-Guilbaud
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France

Amorphous hydrogenated carbon particles have been observed in a pure methane low pressure radiofrequency discharge at 13.56 MHz. In the plasma, the formation and the presence of two kinds of particles have been evidenced by use of laser light scattering. The study of the laser beam extinction gives informations on the generation and the behavior of the particles in the discharge. The particles are trapped into clouds located at the boundaries between the anodic and cathodic sheath and the plasma bulk. The cloud evolution has been correlated with the temporal evolutions of the experimental parameters as dc bias voltage and gas pressure. An infrared spectrometry analysis of the two kinds of particles has been realized

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