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High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)

An International Journal

ISSN for PRINT: 1093-3611

Institutional price:	$604.00
Issues per year:	4

Best Paper Award Selection - Editorial Board Site

2006, Volume10

172 pages

DOI: 10.1615/HighTempMatProc.v10.i3

Issue price - $155.00

OPTICAL EMISSION SPECTROSCOPY OF A SUPERSONIC LOW-PRESSURE PLASMA REACTOR USED TO SYNTHESIS SOFC CATHODES THIN LAYERS

F. Rousseau
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

M. Nickravech
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

S. Awamat
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

Daniel Morvan
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

Jacques Amouroux
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

ABSTRACT

A low pressure plasma reactor equipped with a supersonic nozzle was employed to synthesize thin perovskite layers La_1-xSr_x(Mn, Co)O_3±δ on the Solid Oxide Fuel Cell (SOFC) electrolyte from a solution containing nitrates. To determine the role of plasma species in transformation of nitrates into perovskite, Optical Emission Spectroscopy (OES) measurements have been performed on the Ar/O₂ discharge during the deposition. At each injection of nitrates precursors, OES have detected species such as Ar*, O from the dissociation of O₂, and OHº from the decomposition of water. The electronic temperature (2.5 eV), the excitation temperature of Ar (8900 K) and the rotational temperature of OHº (360 K) have been measured. The results have confirmed that the nitrates are transformed mainly by oxidization reactions at low temperature using O and OHº. This plasma process allows a thin perovskite layer formation without undesirable phases (La(OH)₃...), that are generally produced in thermal processes.