Kathleen
De Bleecker Annemie
Bogaerts ABSTRACT The initial mechanisms of dust formation in radiofrequency acetylene (C2H2) plasmas are investigated by means of a self-consistent 1D fluid model. Possible routes for particle growth are discussed and a comparison with particle formation in silane (SiH4) discharges is made. The model considers a set of 39 species, including neutrals, radicals, ions and electrons, describing hydrocarbons (CnHm) containing up to 12 carbon atoms. Both successive anion/cation - molecule reactions seem to lead to a fast build up of the carbon skeleton.
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