High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) An International Journal

ISSN for PRINT: 1093-3611

For Online Access

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2002, Volume6

Issue 3

100 pages

Issue price - $144.00

Jolanta Baranowska
Institute of Materials Engineering, Technical University of Szczecin AL Piastow 19, 70-310 Szczecin, Poland

The author presents results of investigations relative to the influence of cathode sputtering on iron surface. The samples were sputtered with nitrogen for different parameters: voltage 700-1350 V, current density 10-40 A/m² and time 10-60 min. Changes on the surface were investigated using the following methods: SEM investigation of surface and cross-sections, SIMS (profile of nitrogen distribution), XRD structure analysis (GID technique), roughness measurements.
A strong influence of cathode sputtering on iron surface was observed. The roughness increased, moreover during the sputtering a chemical reaction between nitrogen and iron took place. This reaction resulted in nitrided zone formation. For some samples even a compact nitride layer was formed.

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