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High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)

An International Journal

ISSN for PRINT: 1093-3611

Institutional price:	$604.00
Issues per year:	4

Best Paper Award Selection - Editorial Board Site

2001, Volume5

160 pages

Issue price - $144.00

DEPOSITION OF TiN COATINGS WITH THE USE OF A COAXIAL HYBRID SOURCE

Jan Walkowicz
Institute for Terotechnology, 26-600 Radom, ul. Pulaskiego 6/10, Poland

Krzysztof Miernik
Institute for Terotechnology, ul. Pulaskiego 6/10, 26-600 Radom, Poland

ABSTRACT

The new hybrid plasma source which is the combination of a cylindrical DC magnetron with a pulsed coaxial accelerator was investigated. The results of the study of discharge characteristics and properties of deposited TiN coatings are presented. The influence of pulsed ion bombardment on the chemical composition of deposited coatings is shown.