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High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)

An International Journal

ISSN for PRINT: 1093-3611

Institutional price:	$604.00
Issues per year:	4

Best Paper Award Selection - Editorial Board Site

2004, Volume8

178 pages

DOI: 10.1615/HighTempMatProc.v8.i1

Issue price - $144.00

DUST PARTICLE FORMATION IN A LOW PRESSURE CH₄-N₂ RADIO-FREQUENCY (13.56 MHz) PLASMA.

lsabelle Geraud-Grenier
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France

Veronique Massereau-Guilbaud
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France

Andre Plain
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France

ABSTRACT

Polymer-like hydrogenated amorphous carbon nitride (a-CN_x:H) nanoparticles are observed in a CH₄(50 %)/N₂(50 %) rf plasma. SEM micrographs show that the dust particles are spherical with diameters in the range 0.2-1.1 μm for rf powers in the range 40-120 W. They are trapped in the plasma bulk volume. The absorption spectra of the a-CN_x:H particles reveal the presence of C-H, C=N and C≡N bonds. The absorption peak intensities strongly depend on the incident rf power. The C≡N triple bonds increase with the rf power whereas the C-H bonds decrease.