High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) An International Journal

ISSN for PRINT: 1093-3611

For Online Access

Best Paper Award Selection - Editorial Board Site

2007, Volume11

Issue 4

161 pages

DOI: 10.1615/HighTempMatProc.v11.i4

Issue price - $168.00

V. A. Kagadei
High Current Electronics Institute, Siberian Branch, Russian Academy of Science, 2/3 Academichesky Av., 634055 Tomsk, Russia

D. I. Proskurovski
High Current Electronics Institute, Siberian Branch, Russian Academy of Science, 2/3 Academichesky Av., 634055 Tomsk, Russia

S. V. Romanenko
High Current Electronics Institute, Siberian Branch, Russian Academy of Science, 2/3 Academichesky Av., 634055 Tomsk, Russia

Results of impurity composition investigation of large-area atomic hydrogen beam formed by a low-pressure arc discharge source with self-heated cathode was cited. The study was performed on 18 metallic elements. Method, based on measurement of sheet concentration of metal atoms on Si sample surface before and after exposition in AH flow was used for determination of composition of impurities in AH beam. Measurement of sheet concentration of metal atoms was realized by time of fly secondary ion mass spectroscopy. The method sensitivity was 10⁸ at cm⁻². Principal reason of parasitic metal particles occurrence in the beam was investigated.

DOI: 10.1615/HighTempMatProc.v11.i4.80 Download article, 565-573 pages

Article price - $35.00

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