Annals of the Assembly for International Heat Transfer Conference 13

ISBN 1-56700-225-0 / CD 1-56700-226-9

Year 2006

T. Munakata
National Institute of Advanced Industrial Science and Technology (AIST), Japan

Effect of crystal and crucible rotations on instability of Czochralski Silicon melt natural convection has been investigated numerically with three-dimensional code. In the numerical model, flat crystal/melt interface and melt free surface have been assumed. The crystal and crucible rotation rates are changed from 0 to 5 rpm with the same and opposite direction. In the case of pure crystal rotation, the temperature and velocity fluctuation fields take an irregular time dependent pattern. On the contrary, in the case of pure crucible rotation, the instability of melt natural convection can not be suppressed completely, however, the temperature and velocity fluctuation fields take a regular periodical pattern under 5 rpm. Further, if the crystal rotation is applied to the crucible rotation rate of 5 rpm, the regular periodical pattern of temperature fluctuation structure is destroyed if the crystal and crucible are rotated same direction. However, if the crystal and crucible are rotated oppositely, the regular periodical pattern of fluctuation is maintained until 5 rpm of the crystal rotation. These results show that the direction of crystal and crucible rotation influences the instability of melt convection.

MCV-10 pages DOI: 10.1615/IHTC13.p15.100 Download article

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