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Annual Reviews of Heat Transfer

ISSN 1049-0787

Individual price:

$175.00 (Must be sent to your home address)

You can order single issue or individual article. To purchase a single issue or an individual article as well as to view tables of contents and abstracts click on issue number.

Institutional price:

$349.00

Volumes per year:

various

Year 1994

458 pages

Volume price - $141.00

HEAT TRANSFER IN LASER PROCESSING OF THIN FILMS

Costas P. Grigoropoulos
University of California at Berkeley, Department of Mechanical Engineering, 6177 Etcheverry Hall, Berkeley, CA 94720-1740, USA

ABSTRACT

Laser processing of thin films has become a field of growing importance with applications including the manufacturing of micromechanical devices and the fabrication of novel, high-performance electronic circuits. Interactions of laser radiation with matter may lead to controlled phase-change transformations and material structure modifications. This work reviews the technical literature and discusses experimental and theoretical heat transfer studies on micromachining, melting, transient annealing, and pulsed-laser deposition of thin films.