Авторы, Редакторы, Рецензенты

G. Dingemans

Technische Universiteit Eindhoven, Applied Physics dept, Den Dolech 2, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, EU
Больше информации об авторе - в Directory of Specialists

Articles

IN SITU IR OPTICAL MEASUREMENTS OF GAS PROPERTIES IN A CAPACITIVELY COUPLED RF Ar/SiH4 PLASMA Vol. 9 '2005 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes