Авторы, Редакторы, Рецензенты

M. Sorokin

Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
Больше информации об авторе - в Directory of Specialists

Articles

FLOW AND TEMPERATURE DEPENDENCE OF PARTICLE FORMATION IN AR-SILANE RF CAPACITIVELY COUPLED PLASMAS Vol. 9 '2005 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes