Авторы, Редакторы, Рецензенты

M. Shaekhov

Kazan State Technological University, Light Industry Department
Больше информации об авторе - в Directory of Specialists

Articles

INVESTIGATION OF SPATIAL CHARGE SHELL OF SPECIMEN IN INDUCTIVE COUPLED RF DISCHARGE AT LOW PRESSURE Vol. 0 '2001 - Progress in Plasma Processing of Materials, 2001