Авторы, Редакторы, Рецензенты

L. Toganbaeva

Al-Farabi Kazakh National University, Almaty, Kazakhstan
Больше информации об авторе - в Directory of Specialists

Articles

LIGHT-EMITTING N-RICH SILICON NITRIDE FILMS DEPOSITED BY PLASMA-ENHANCED AND LOW-PRESSURE CVD Vol. 18 '2014 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes