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D. Ballutaud
Laboratoire de Physique des Solides et de Cristallogenese, CNRS, 1 place Aristide Briand, F-92195 Meudon CEDEX, France
Get more info about author from Directory of Specialists
Articles
EFFECTS OF PLASMA PARAMETERS ON PASSIVATION OF POLYCRYSTALLINE SILICON IN INDUCTIVE LOW PRESSURE HYDROGEN PLASMA
Vol. 11 '2007
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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
PURIFICATION AND HYDROGENATION OF METALLURGICAL SILICON POWDER BY RF THERMAL PLASMA. CHARACTERIZATION OF THE DEPOSIT
Vol. 7 '2003
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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
PASSIVATION OF POLYCRYSTALLINE SILICON BY HYDROGEN PLASMA : CHARACTERIZATION BY IMPEDANCE SPECTROSCOPY
Vol. 9 '2005
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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
PURIFICATION AND HYDROGENATION OF METALLURGICAL SILICON POWDER BY RF THERMAL PLASMA. CHARACTERIZATION OF THE DEPOSIT.
Vol. 0 '2003
-
Progress in Plasma Processing of Materials, 2003
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