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W.M.M. Kessels
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Dept. of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
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Articles
HIGH-RATE SILICON NITRIDE DEPOSITION FOR PHOTOVOLTAICS: FROM FUNDAMENTALS TO INDUSTRIAL APPLICATION
Vol. 9 '2005
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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
FAST DEPOSITION OF DEVICE QUALITY HYDROGENATED AMORPHOUS SILICON BY AN EXPANDING THERMAL PLASMA
Vol. 1 '1999
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Progress in Plasma Processing of Materials, 1999
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