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A. Meckeshkin-Abdullin
Dpt. of Light Industries - Kazan State Technological University 68, K.Marks str., Kazan 420015 - Russia
Get more info about author from Directory of Specialists
Articles
SIMULATION OF LOW-PRESSURE RF DISCHARGES IN PROCESSING OF SOLID SURFACES
Vol. 0 '2001
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Progress in Plasma Processing of Materials, 2001
THEORETICAL AND EXPERIMENTAL INVESTIGATIONS OF MODIFICATION OF MATERIALS AT LOW PRESSURE RF PLASMAS
Vol. 0 '2003
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Progress in Plasma Processing of Materials, 2003
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