Begell House Authors, Editors and Reviewers

Berthold Michelt

Siemens AG, Corporate Research and Development, Plasma- and Switching Technology, P.O.B. 3220, D-91050 Erlangen, Germany
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Articles

Rotational Temperature of Oxygen in a High-Power Inductively Coupled Plasma Vol. 1 '1997 - Progress in Plasma Processing of Materials, 1997