Begell House Authors, Editors and Reviewers

Z. B. Omarova

Institute of Physics and Technology, 050032 Ibragimov str, 11, Almaty, Kazakhstan
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Articles

AN INFLUENCE OF PLASMA TREATMENT ON STRUCTURE PROPERTIES OF THIN SiC FILMS ON Si Vol. 14 '2010 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes