Begell House Authors, Editors and Reviewers
Hajime Sakakita
Innovative Plasma Processing Group, Electronics and Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan; Department of Engineering Mechanics and Energy, Graduate School of Systems and Information Engineering, University of Tsukuba, 1-1-1Tennoudai, Tsukuba, Ibaraki 305-8573, Japan