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A.A. Goryachev
Institute of Microelectronics of Russian Academy of Sciences, Universitetskaya 21, 150000 Yaroslavl, Russia
Get more info about author from Directory of Specialists
Articles
PLASMA STIMULATED GROWTH OF THIN FILMS
Vol. 1 '1999
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Progress in Plasma Processing of Materials, 1999
STUDY OF LOW TEMPERATURE PLASMA-STIMULATED GROWTH OF YSZ THIN FILMS ON Si SUBSTRATE
Vol. 1 '1999
-
Progress in Plasma Processing of Materials, 1999
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