Begell House Authors, Editors and Reviewers

L. Toganbaeva

Al-Farabi Kazakh National University, Almaty, Kazakhstan
Get more info about author from Directory of Specialists

Articles

LIGHT-EMITTING N-RICH SILICON NITRIDE FILMS DEPOSITED BY PLASMA-ENHANCED AND LOW-PRESSURE CVD Vol. 18 '2014 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes