Begell House作者，编辑及审稿者

J. Zila

Department of Physical Electronics, Masaryk University Kotlarska 2, 611 37 Brno, Czech Republic
Get more info about author from Directory of Specialists

Articles

REDUCTION OF TUNGSTEN PRECURSORS IN INDUCTIVELY COUPLED RF DISCHARGE Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003