Begell House作者，编辑及审稿者

V.S. Zheltoukhin

Kazan State University 18, Kremlyovskaya str. - Kazan 420008 - Russia
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Articles

SIMULATION OF THE TREATMENT OF SOLID SURFACES USING LOW PRESSURE RF PLASMA STREAM Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999