Begell House作者，编辑及审稿者

G. Y. Yeom

Dept. of Materials Engineering, Sungkyunkwan University, 300 Chunchun-dong, Suwon, Kyunggi-do, 440-746 Korea

Get more info about author from Directory of Specialists

Articles

THE STUDY OF ATMOSPHERIC PRESSURE PLASMA BY CAPILLARY DIELECTRIC COVERED ELECTRODE AND ITS APPLICATION TO PHOTORESIST ETCHING AND SURFACE CLEANING Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003